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Galvanoplating and sacrificial layers for surface micromachining
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1995
Journal Article
Titel
Galvanoplating and sacrificial layers for surface micromachining
Author(s)
Maciossek, A.
Löchel, B.
Wagner, B.
Schulze, W.
Noetzel, J.
Quenzer, H.J.
Zeitschrift
Microelectronic engineering
Konferenz
International Conference on Micro- and Nano-Engineering 1994
DOI
10.1016/0167-9317(94)00154-M
Language
English
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Fraunhofer-Institut fĂĽr Siliziumtechnologie ISIT