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Galvanoplating and sacrificial layers for surface micromachining
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1995
Journal Article
Title
Galvanoplating and sacrificial layers for surface micromachining
Author(s)
Maciossek, A.
Löchel, B.
Wagner, B.
Schulze, W.
Noetzel, J.
Quenzer, H.J.
Journal
Microelectronic engineering
Conference
International Conference on Micro- and Nano-Engineering 1994
DOI
10.1016/0167-9317(94)00154-M
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
