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1998
Conference Paper
Titel
Functional porous ceramic films by pulsed laser deposition
Abstract
Physical vapor deposition techniques are used in a variety of applications to deposit thin films with particular structural and functional properties for applications such as electronic, mechanical, optical and tribological coatings. The vapor/plasma states used in surface and thin film technology are generated by electrical, optical or chemical means. In the case of optical plasma formation, laser radiation is usually used to generate a hot, dense and highly excited plasma.