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A fully integrated surface micromachined pressure sensor with low temperature dependency


Foundation for Sensor and Actuator Technology, Stockholm:
8th International Conference on Solid-State Sensors and Actuators 1995 and Eurosensors IX. Digest of technical papers. Vol. 1. Sessions A1-PD6. Papers No. 1-231
Stockholm: Congrex, 1995
ISBN: 91-630-3473-5
International Conference on Solid-State Sensors and Actuators <8, 1995, Stockholm>
Eurosensors <9, 1995, Stockholm>
Conference Paper
Fraunhofer IMS ()
Druckfestigkeit; Druckmessung; kapazitives Meßverfahren; Kondensatorschalterfilter; surface micromachining; Temperaturgang

The sensor presented here has been developed for the measurement of absolute pressure in the fields of automotive and industrial applications. The integration of the system consists of a pressure sensor and a signal conditioning circuit with an analog output on a chip of 3.6mm². The fabrication technique to form the sensor is surface micromachining implemented in a standard 1.5µm CMOS process allowing the construction of very small pressure sensor elements with exellent mechanical properties. The temperature coefficient of the hole system is lower than 200 ppm/øC without any compensation. It can be used in a temperature range of -40øC to +125øC.