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Fully automated angle resolved scatterometer

: Neubert, J.; Seifert, T.

Cerutti-Maori, G. ; European Commission, Directorate-General for Science, Research and Development; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Space Optics 1994: Earth Observation and Astronomy : 19-22 April 1994, Garmisch-Partenkirchen
Bellingham/Wash.: SPIE, 1994 (Europto series)
ISBN: 0-8194-1513-8
Conference Paper
Fraunhofer IOF ()
angle resolved scatter; BRDF; metrology; surface roughness

The ARS-scatterometer at the IOF Jena which has been designed and built in cooperation with the Carl Zeiss JENA GmbH is capable of performing accurate measurements of the BRDF over a range of approximately eleven orders of magnitude (from 10 high5 to 10 high-6 sr high-1) in BRDF These measurements can be carried out for surfaces made of any dielectric. metallic or semiconductor material. A He-Ne-laser is used in conjunction with a mirror beam focusing optics.The eight motorized degrees of freedom of the instruments are computer controlled and interfaced to the user by a sophisticated software running under MicroSoft Windows.It is shown. that the scatterometer is sensitive to a rms-roughness better than 1 nm.