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Fragmentational collisions in reactive ion beam processing
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1993
Journal Article
Titel
Fragmentational collisions in reactive ion beam processing
Author(s)
Hoffmann, P.
Heinrich, F.
Zeitschrift
Vacuum
DOI
10.1016/0042-207X(93)90168-A
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT