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Formation of cobalt silicide by ion beam mixing

: Burte, E.P.; Min, Y.; Ryssel, H.

Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms 59/60 (1991), pp.528-531
ISSN: 0168-583X
International Conference on Ion Beam Modification of Materials <7, 1990, Knoxville/Tenn.>
Journal Article, Conference Paper
Fraunhofer IIS B ( IISB) ()