Fluid-filled dielectric induction micromotor with Al-SiO2 rotor

The paper presents first results obtained with a dielectric induction micromotor with Al-SiOsub2 rotor. The rotor and gold electrode stator, fabricated separately in IC-processes, are immersed in a fluid (water, ethanol or glycerine). The aluminium rotors, 2 mym thick and 100 - 200 mym in diameter, are covered on all surfaces by a SiOsub2 layer. The motor was operated at field frequencies between 0.3 KHz and 30 MHz and applied voltages varying between 5 and 110 V. At maximum voltage an extremely high rotation speed of 16000 rpm was measured. The calculated value of torque was approximately 3 *10high-13 Nm.