Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Fluid-filled dielectric induction micromotor with Al-SiO2 rotor
| Institute of Electrical and Electronics Engineers -IEEE-:
MEMS '93. IEEE Workshop on Micro Electro Mechanical Systems
Piscataway/N.Y., 1993
ISBN: 0-7803-0957-X |
| Workshop on Micro Electro Mechanical Systems (MEMS) <1993, Fort Lauderdale/Fla.> |
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| English |
| Conference Paper |
| Fraunhofer ISIT () |
Abstract
The paper presents first results obtained with a dielectric induction micromotor with Al-SiOsub2 rotor. The rotor and gold electrode stator, fabricated separately in IC-processes, are immersed in a fluid (water, ethanol or glycerine). The aluminium rotors, 2 mym thick and 100 - 200 mym in diameter, are covered on all surfaces by a SiOsub2 layer. The motor was operated at field frequencies between 0.3 KHz and 30 MHz and applied voltages varying between 5 and 110 V. At maximum voltage an extremely high rotation speed of 16000 rpm was measured. The calculated value of torque was approximately 3 *10high-13 Nm.