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Fluid-filled dielectric induction micromotor with Al-SiO2 rotor

: Wagner, B.; Fuhr, G.; Müller, T.; Schnelle, T.; Benecke, W.

Institute of Electrical and Electronics Engineers -IEEE-:
MEMS '93. IEEE Workshop on Micro Electro Mechanical Systems
Piscataway/N.Y., 1993
ISBN: 0-7803-0957-X
Workshop on Micro Electro Mechanical Systems (MEMS) <1993, Fort Lauderdale/Fla.>
Conference Paper
Fraunhofer ISIT ()

The paper presents first results obtained with a dielectric induction micromotor with Al-SiOsub2 rotor. The rotor and gold electrode stator, fabricated separately in IC-processes, are immersed in a fluid (water, ethanol or glycerine). The aluminium rotors, 2 mym thick and 100 - 200 mym in diameter, are covered on all surfaces by a SiOsub2 layer. The motor was operated at field frequencies between 0.3 KHz and 30 MHz and applied voltages varying between 5 and 110 V. At maximum voltage an extremely high rotation speed of 16000 rpm was measured. The calculated value of torque was approximately 3 *10high-13 Nm.