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A fast-tool-servo system based on electrodynamic and piezoelectric actuators

: Weck, M.; Özmeral, H.

Production Engineering. Research and development in Germany. Annals of the German Academic Society for Production Engineering 2 (1996), No.2
ISSN: 0944-6524
Journal Article
Fraunhofer IPT ()
actuator; diamond turning; fast-tool-servo; linear motor; non-rotationally symmetric surfaces; piezoelectric translator

The increasing demand of structured ultra-precision parts leads to new technologies for the manufacturing of nonrotationally symmetric optics with high surface and form quality. Based on the existing fast-tool-servo system a new hybrid fast-tool-servo system with two mechanically coupled actuators was designed: a piezo system with a stroke of 40 micron at 1000 Hz and a linear motor with a stroke of 2 mm at 40 Hz. This paper gives a detailed technical description of the new system as well as examples of diamond turned nrs laser optics machined with the hybrid fast-tool-servo system.