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A fast switching, low power pneumatic microvalve with electrostatic actuation made by silicon micromachining

 
: Kluge, S.; Klink, G.; Woias, P.

American laboratory 30 (1998), No.6, pp.17ff
ISSN: 0044-7749
English
Journal Article
Fraunhofer IFT; 2000 dem IZM eingegliedert
fast switching; low power; micro valve; Pneumatik

Abstract
In this contribution we present an electrostatically actuated microvalve to be used both as a pneumatic switch and as a gas flow regulator. The normally open 2/2-way valve consists of two micromachined silicon chips mounted at a short distance. By applying a DC voltage between the components, the valve plate is deflected onto the orifice and interrupts the gas flow. One of the main advantages of this novel concept is a high flow rate (max. 700 ml/min) achieved with a sophisticated geometry of the orifice. Furthermore the device can be operated at a high pressure (over 10x10(exp 5) Pa), which is needed for industrial applications where a high power density is required. The device itself has a very small size (6 x 6 x 1 mm 3 ) and a very low electrical power consumption (< 5 myJ per switching cycle). It can be driven with pulse-width modulated signals up to 1 kHz thus permitting a linear control of the gas flow, e.g. for dosing applications.

: http://publica.fraunhofer.de/documents/PX-13958.html