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A fast liquid flow sensor with thermal isolation by oxide filled tranches.
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1994
Conference Paper
Title
A fast liquid flow sensor with thermal isolation by oxide filled tranches.
Author(s)
Mokwa, W.
Kersjes, R.A.
Mainwork
Eurosensors VIII. Book of Abstracts
Conference
Eurosensors 1994
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Keyword(s)
anemometer
