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Fabrication of relief-topographic surfaces with one-step UV-lithographic
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1995
Journal Article
Titel
Fabrication of relief-topographic surfaces with one-step UV-lithographic
Author(s)
Quenzer, H.J.
Henke, W.
Hoppe, W.
Pilz, W.
Reimer, K.
Wagner, B.
Zeitschrift
Microsystem Technologies
DOI
10.1007/BF01371495
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT