Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Fabrication of microrelief surfaces using a one-step lithography process
| Motamedi, M.E. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Microelectronic structures and MEMS for optical processing III : 29-30 September 1997, Austin/Texas
Bellingham, Wash.: SPIE, 1997 (SPIE Proceedings Series 3226)
ISBN: 0-8194-2658-X
pp.2-10 |
| Conference "Microelectronic Structures and MEMS for Optical Processing" <3, 1997, Austin/Tex.> |
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| English |
| Conference Paper |
| Fraunhofer ISIT () |