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  4. Fabrication of microrelief surfaces using a one-step lithography process
 
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1997
Conference Paper
Title

Fabrication of microrelief surfaces using a one-step lithography process

Author(s)
Reimer, K.
Hofmann, U.
Jürss, M.
Pilz, W.
Quenzer, H.J.
Wagner, B.
Mainwork
Microelectronic structures and MEMS for optical processing III  
Conference
Conference "Microelectronic Structures and MEMS for Optical Processing" 1997  
DOI
10.1117/12.284557
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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