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Fabrication of microrelief surfaces using a one-step lithography process
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1997
Conference Paper
Title
Fabrication of microrelief surfaces using a one-step lithography process
Author(s)
Reimer, K.
Hofmann, U.
Jürss, M.
Pilz, W.
Quenzer, H.J.
Wagner, B.
Mainwork
Microelectronic structures and MEMS for optical processing III
Conference
Conference "Microelectronic Structures and MEMS for Optical Processing" 1997
DOI
10.1117/12.284557
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
