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Fabrication of 3.5 GHz surface acoustic wave filters by ion projection lithography

 
: Kreutzer, M.; Zwicker, G.; Fleischmann, B.; Brünger, W.H.; Buchmann, L.-M.; Torkler, M.

Microelectronic engineering 17 (1992), No.1-4, pp.245-248
ISSN: 0167-9317
International Conference on Microlithography: Microcircuit Engineering (ME) <17, 1991, Rome>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-13693.html