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Fabrication of 3.5 GHz surface acoustic wave filters by ion projection lithography
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1992
Journal Article
Titel
Fabrication of 3.5 GHz surface acoustic wave filters by ion projection lithography
Author(s)
Kreutzer, M.
Zwicker, G.
Fleischmann, B.
BrĂ¼nger, W.H.
Buchmann, L.-M.
Torkler, M.
Zeitschrift
Microelectronic engineering
Konferenz
International Conference on Microlithography: Microcircuit Engineering (ME) 1991
Language
English
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Fraunhofer-Institut fĂ¼r Siliziumtechnologie ISIT