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Fabrication and analysis of a thick-film humidity sensor based on MnWO4

: Dellwo, U.; Keller, P.; Meyer, J.-U.


Sensors and Actuators. A 61 (1997), pp.298-302
ISSN: 0924-4247
Journal Article
Fraunhofer IBMT ()
Dickfilm-Feuchtsensor; Feuchtsensor; humidity sensor; MnWO4; thick-film humidity sensor

A low-cost humidity sensor in thick-film technology has been developed based on MnWO4, In this paper, effects of preparation parameters and influences of additives on the sensor properties and membrane composition are described. Measurements of the sensor impedance are presented as a function of humidity.