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  4. Experimental verification of three-dimensional simulations of LTO layer deposition using geometries prepared with anisotropic wet-etching of silicon with KOH
 
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1996
Conference Paper
Title

Experimental verification of three-dimensional simulations of LTO layer deposition using geometries prepared with anisotropic wet-etching of silicon with KOH

Author(s)
Bär, E.  orcid-logo
Lorenz, J.  
Ryssel, H.
Mainwork
8th Workshop on Dielectrics in Microelectronics 1996. Abstract Book  
Conference
Workshop on Dielectrics in Microelectronics 1996  
Language
English
IIS-B  
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