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Experimental verification of three-dimensional simulations of LTO layer deposition using geometries prepared with anisotropic wet-etching of silicon with KOH

	8th Workshop on Dielectrics in Microelectronics 1996. Abstract Book Venedig, 1996
	Workshop on Dielectrics in Microelectronics <8, 1996, Venedig>

	English
	Conference Paper
	Fraunhofer IIS B ( IISB) ()