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Experimental verification of three-dimensional simulations of LTO layer deposition using geometries prepared with anisotropic wet-etching of silicon with KOH
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1996
Conference Paper
Title
Experimental verification of three-dimensional simulations of LTO layer deposition using geometries prepared with anisotropic wet-etching of silicon with KOH
Author(s)
Bär, E.
Lorenz, J.
Ryssel, H.
Mainwork
8th Workshop on Dielectrics in Microelectronics 1996. Abstract Book
Conference
Workshop on Dielectrics in Microelectronics 1996
Language
English
IIS-B
