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Experimental study on optically activated silicon resonators
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1990
Conference Paper
Titel
Experimental study on optically activated silicon resonators
Author(s)
Wagner, B.
Benecke, W.
Wölfelschneider, H.
Ramakrishnan, S.
Kist, R.
Hauptwerk
Eurosensors IV. Book of Abstracts
Konferenz
Eurosensors 1990
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT