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Excitation of an excimer laser with microwave resonator

: Hünermann, L.; Meyer, R.; Richter, F.; Schnase, A.

Letardi, T.; Laude, L.D. ; West European Optical Societies; Association Nationale de la Recherche Technique -ANRT-; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; European Physical Society -EPS-, Geneva:
Excimer lasers and applications III. Proceedings
Bellingham/Wash.: SPIE, 1991 (SPIE Proceedings Series 1503)
ISBN: 0-8194-0612-0
European Congress on Optics (ECO) <4, 1991, The Hague>
Conference Paper
Fraunhofer ILT ()
cavity; frequency; microwave; oscilloscope; power; pressure; pulse; pumped laser; resonator

In this work excimer Laser excitation with resonant microwave structures was obtained both for XeCl and KrF. The discharge tube containing the laser gas is placed inside one or several coupled microwave resonators. Depending on the microwave structure laser pulse energies up to the mJ-range were achieved with XeCl.