Evaluation of thin MgF2 films by spectroscopic ellipsometry

In this paper we have focused on the investigation of the structure of MgF2 thin films. Spectroscopic ellipsometry (SE) (SOPRA) has been used to evaluate optical inhomogenities, namely the depth-distribution of water-filled voids and the dispersion of the refractive index in the 250-900 mm vavelength region. The SE data regression analysis was supported by transmission electron microscopy (TEM) structure models and confirmed by SIMS.