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Evaluation of residual stresses in a strongly textured saw blade for the production of silicon-wafers

: Hauk, V.; Derycke, Pascal; Theiner, Werner Alfred

	Hauk, V.; Hougardy, H.P.; Macherauch, E.; Tietz, H.-D.: Residual Stresses Oberursel: DGM-Informationsgesellschaft, 1993 ISBN: 3-88355-192-9 pp.313-322
	European Conference on Residual Stresses <1992, Frankfurt/Main>

	English
	Conference Paper
	Fraunhofer IZFP ()
	residual stress; Röntgen; silicon; Textur; texture; x-ray; x-ray inspection

Abstract
The residual stress (RS)- and texture-states determine along with material strength and composition the performance of saw blades. Different test results are published but none compare X-ray, mechanical and magnetic measurements on a saw blade made from ferritic-austenitic steel. Here we report on that.

: http://publica.fraunhofer.de/documents/PX-13282.html