• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Konferenzschrift
  4. Error sources, measurement uncertainties and calibration techniques in high-precision metrology
 
  • Details
  • Full
Options
1999
Conference Paper
Title

Error sources, measurement uncertainties and calibration techniques in high-precision metrology

Abstract
Although high-precision measuring devices, e.g. interferometers, are emerging more and more from the laboratory into the shop floor, many users are totally oblivious to potential errors that inevitably creep into the measuring process. This paper touches upon potential error sources that can be encountered in interferometry and shows a method for expressing measurement uncertainty. Furthermore, possibilities for interferometer calibration are illustrated.
Author(s)
Bitte, Frank
Mischo, Horst
Pfeifer, Tilo
Mainwork
Precision Engineering - Nanotechnology. Proceedings of the 1st International EUSPEN Conference. Vol.2  
Conference
European Society for Precision Engineering and Nanotechnology (International Conference and General Meeting) 1999  
Language
English
Fraunhofer-Institut für Produktionstechnologie IPT  
Keyword(s)
  • calibration

  • error source

  • high precision metrology

  • interferometry

  • measurement uncertainty

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024