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Error sources, measurement uncertainties and calibration techniques in high-precision metrology

: Bitte, F.; Mischo, H.; Pfeifer, T.

McKeown, P. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
Precision Engineering - Nanotechnology. Proceedings of the 1st International EUSPEN Conference. Vol.2
Aachen: Shaker, 1999 (Berichte aus der Fertigungstechnik)
ISBN: 3-8265-6085-X
European Society for Precision Engineering and Nanotechnology (International Conference and General Meeting) <1, 1999, Bremen>
Conference Paper
Fraunhofer IPT ()
calibration; error source; high precision metrology; interferometry; measurement uncertainty

Although high-precision measuring devices, e.g. interferometers, are emerging more and more from the laboratory into the shop floor, many users are totally oblivious to potential errors that inevitably creep into the measuring process. This paper touches upon potential error sources that can be encountered in interferometry and shows a method for expressing measurement uncertainty. Furthermore, possibilities for interferometer calibration are illustrated.