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  4. Energy and particle fluxes in PLD processes
 
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1997
Conference Paper
Title

Energy and particle fluxes in PLD processes

Author(s)
Lenk, A.
Schultrich, B.
Witke, T.
Weiß, H.-J.
Mainwork
Laser processing of surfaces and thin films. Proceedings of Symposium H on Laser Processing of Surfaces and Thin Films of the 1996 E-MRS Spring Conference  
Conference
Symposium on Laser Processing of Surfaces and Thin Films 1996  
European Materials Research Society (Spring Meeting) 1996  
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • Plasma-Diagnostik

  • PLD

  • Faserbeschichtung

  • Laser-Verfahren

  • Laserchemie

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