: Kreutz, E.W.; Lemmer, O.; Wesner, D.A.; Alunovic, M.; Erkens, G.; Leyendecker, F.; Voss, A.

Abstract
The deposition of zirconia films by electron and laser radiation on steel substrates was investigated as a function of beam parameters and processing variables. The type, the number and the angular distribution of the particles in the vapour/plasma have been studied in order to influence the film growth on the substrate via variation of beam parameters and processing variables. The composition of the vapour/plasma and the energy of the particles was measured by emission spectroscopy, and the geometry of the vapour/plasma plume by high-speed photography. The properties of the films were investigated using scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, Raman spectroscopy and mechanical testing by hardness measurements. Different film structures are obtained by matching the beam parameters, processing variables and geometrical arrangement of target and substrate, which are discussed in view of applications.