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  4. Electromechanical modeling beyond VHDL-AMS
 
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1999
Conference Paper
Title

Electromechanical modeling beyond VHDL-AMS

Abstract
Analytical modeling for electromechanics sometimes requires features like the representation of bended structures, the inclusion of (moving) boundary conditions or spatial integrations and differentiations. All these points are currently not directly addressed in VHDL-AMS and other analog hardware description languages. This paper illustrates this, using the example of a capacitive pressure sensor. The behavior of the introduced model is verified with finite element analysis.
Author(s)
Voßkämper, L.
Lüdecke, A.
Leineweber, M.
Pelz, G.
Mainwork
International Workshop on Behavioral Modeling and Simulation 1999. Proceedings  
Conference
International Workshop on Behavioral Modeling and Simulation (BMAS) 1999  
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Keyword(s)
  • analytical modeling

  • circular diaphragm

  • Drucksensor

  • multi-domain simulation

  • pressure sensor

  • simulation

  • touch mode

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