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Electrical conductivity and microstructure of metal-containing a-C-H films.

Elektrische Leitfähigkeit und Mikrostruktur metallhaltiger a-C-H Filme
: Benndorf, C.; Boettger, E.; Fryda, M.; Haubold, H.G.; Köberle, H.; Klages, C.-P.

Synthetic metals (1991), No.41-43, pp.4055/4058
ISSN: 0379-6779
International Conference on Synthetic Metals <1990, Tübingen>
Conference Paper
Fraunhofer IST ()
electrical conductivity; electrical properties; elektrische Eigenschaft; elektrische Leitfähigkeit; microstructure; Mikrostruktur; percolation; Perkolation

Metal containing a-C:H films are prepared by a combined PVD-CVD process. The electrical conductivity of these films is measured as a function of metal content and temperature. The varying counductivity behavior for films containing noble metals (Au and Cu) on the one hand and carbide forming metals (Nb and Ta) on the other is correlated to their microstructure.