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  4. Electrical conductivity and microstructure of metal-containing a-C-H films.
 
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1991
Journal Article
Title

Electrical conductivity and microstructure of metal-containing a-C-H films.

Other Title
Elektrische Leitfähigkeit und Mikrostruktur metallhaltiger a-C-H Filme
Abstract
Metal containing a-C:H films are prepared by a combined PVD-CVD process. The electrical conductivity of these films is measured as a function of metal content and temperature. The varying counductivity behavior for films containing noble metals (Au and Cu) on the one hand and carbide forming metals (Nb and Ta) on the other is correlated to their microstructure.
Author(s)
Benndorf, C.
Boettger, E.
Fryda, M.
Haubold, H.G.
Köberle, H.
Klages, C.-P.
Journal
Synthetic metals  
Conference
International Conference on Synthetic Metals 1990  
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST  
Keyword(s)
  • electrical conductivity

  • electrical properties

  • elektrische Eigenschaft

  • elektrische Leitfähigkeit

  • microstructure

  • Mikrostruktur

  • percolation

  • Perkolation

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