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Electrical conductivity and microstructure of metal-containing a-C-H films.

Elektrische Leitfähigkeit und Mikrostruktur metallhaltiger a-C-H Filme

: Benndorf, C.; Boettger, E.; Fryda, M.; Haubold, H.G.; Köberle, H.; Klages, C.-P.

	Synthetic metals (1991), No.41-43, pp.4055/4058 ISSN: 0379-6779
	International Conference on Synthetic Metals <1990, Tübingen>

	English
	Conference Paper
	Fraunhofer IST ()
	electrical conductivity; electrical properties; elektrische Eigenschaft; elektrische Leitfähigkeit; microstructure; Mikrostruktur; percolation; Perkolation

Abstract
Metal containing a-C:H films are prepared by a combined PVD-CVD process. The electrical conductivity of these films is measured as a function of metal content and temperature. The varying counductivity behavior for films containing noble metals (Au and Cu) on the one hand and carbide forming metals (Nb and Ta) on the other is correlated to their microstructure.

: http://publica.fraunhofer.de/documents/PX-11600.html