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Electrical and optical properties of amorphous fluorocarbon films prepared by plasma polymerization of perfluoro-1,3-dimethylcyclohexane

 
: Weber, A.; Pöckelmann, R.; Klages, C.-P.

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Journal of vacuum science and technology A. Vacuum, surfaces and films 16 (1998), No.4, pp.2120-2124
ISSN: 0734-2101
English
Journal Article
Fraunhofer IST ()

Abstract
The electrical and optical properties of amorphous fluorocarbon films (a-C:F) prepared by plasma polymerization have been investigated. Perfluoro- 1,3-dimenthylcyclohexane was introduced into a parallel plate plasma reactor operating at 13.56 MHz to deposit a-C:F films. Transparent a-C:F films with an F/C ratio of 2 were prepared at lower power densities of 10-300 mW/cm(2) at deposition rates of 4-10 nn/min. The films have a low surface energy of 15 mN/m and are thermally stable up to 210 degrees C. The coatings exhibit low refractive index of 1.38, low dielectric constant of 2.3, and high transmittance in the visible range. The electret properties were evaluated by measuring the decay of a positive surface potential (SPD) on 25 mu m thick a-C:F films. High rf power densities lead to an increased formation of conjugated C-C double bonds affecting the transmittance and SPD characteristic.

: http://publica.fraunhofer.de/documents/PX-11590.html