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Elastic modulus. A suitable quantity for characterization of thin films

 
: Schneider, D.; Schultrich, B.

5th International Conference on Plasma Surface Engineering 1996. Book of abstracts
Garmisch-Partenkirchen, 1996
International Conference on Plasma Surface Engineering <5, 1996, Garmisch-Partenkirchen>
English
Conference Paper
Fraunhofer IWS ()

: http://publica.fraunhofer.de/documents/PX-11559.html