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Title
Einrichtung zur Leistungsmodulation bei einer Plasmaanregung, vorzugsweise beim Einsatz von Gaslasern
Date Issued
1996
Author(s)
Rettich, T.
Patent No
1993-4322608
Abstract
The device has electrodes connected to a power source for injecting power into the plasma. Due to the high costs of the high-frequency transmitter, further plasma applications and the use of C0<-2 lasers are restricted since the laser is an ideal but a very expensive tool for many application fields. Thus, the device permits rapid power modulation, but has an extremely cost-effective design comprising low-cost components; the device has an output stage at the output of which is a square-wave output voltage which can be applied to at least one downstream resonant circuit at a frequency at least close to the resonance frequency. A high-frequency high voltage can be generated by combining a high-speed power output stage operating in switch mode and comprising a high-frequency resonant circuit. The device is capable of performing high-speed power modulation in the same way as a high-frequency transmitter. The device is characterized by a high-frequency power control unit and a cost-effecti ve design.
Language
de
Institute
Patenprio
DE 1993-4322608 A: 19930707