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Effect of the substrate temperature on the structure and properties of Al2O3 layers reactively deposited by pulsed magnetron sputtering

 
: Zywitzki, O.; Hoetzsch, G.; Fietzke, F.; Goedicke, K.

:

Surface and coatings technology 82 (1996), No.1-2, pp.169-175
ISSN: 0257-8972
English
Journal Article
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/PX-10638.html