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ECR plasma enhanced MOCVD of titanium nitride

 

Mountziaris, T.J. ; Materials Research Society -MRS-:
Gas-phase and surface chemistry in electronic materials processing. Symposium
Pittsburgh, Pa.: MRS, 1994 (Materials Research Society symposia proceedings 334)
ISBN: 1-558-99233-2
pp.323-328
Symposium on Gas-Phase and Surface Chemistry in Electronic Materials <1993, Boston/Mass.>
Materials Research Society (Fall Meeting) <1993, Boston/Mass.>
English
Conference Paper
Fraunhofer IST ()

: http://publica.fraunhofer.de/documents/PX-10520.html