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ECR plasma enhanced MOCVD of titanium nitride
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1994
Conference Paper
Titel
ECR plasma enhanced MOCVD of titanium nitride
Author(s)
Gross, M.E.
Weber, A.
Nikulski, R.
Klages, C.-P.
Charatan, R.M.
Brown, W.L.
Dons, E.
Eaglesham, D.J.
Hauptwerk
Gas-phase and surface chemistry in electronic materials processing. Symposium
Konferenz
Symposium on Gas-Phase and Surface Chemistry in Electronic Materials 1993
Materials Research Society (Fall Meeting) 1993
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST