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E-beam induced fabrication of microstructures

: Kohlmann, K.T.; Brünger, W.H.

Institute of Electrical and Electronics Engineers -IEEE-:
MEMS '92. IEEE Workshop on Micro Electro Mechanical Systems. An investigation of micro structures, sensors, actuators, machines and robots
New York/N.Y., 1992
ISBN: 0-7803-0497-7
Workshop on Micro Electro Mechanical Systems (MEMS) <1992, Travemünde>
Conference Paper
Fraunhofer ISIT ()

E-beam induced deposition of metal from a metal organic gas has been used for the formation of microstructures of various geometries. Three examples: line deposition, needle growth and bridge formation have been selected for demonstration. Important parameters of the W deposition process from W(CO)sub6 gas are given like minimum feature size, positional accuracy and growth rate.