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Nondestructive testing of thin films
: Schneider, D.; Schultrich, B.

Materialprüfung 38 (1996), No.1/2
ISSN: 0025-5300
Journal Article
Fraunhofer IWS ()
Laser-Akustik; Ultraschall; Schicht

The feasible characterization of layer materials is decisive for optimizing the surface properties and for quality assurance. The module of elasticity and/or density of thin and very thin layers down to 100 nanometres can be determined quickly and reliably by means of high-frequency ultrasonic surface wave., excited by short laser pulses