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Nondestructive testing of thin films
: Schneider, D.; Schultrich, B.

Metalloberfläche : mo (1996), No.1, pp.43-48
ISSN: 0026-0797
ISSN: 0043-2792
Journal Article
Fraunhofer IWS ()
Bornitrid; boron nitride; carbon film; E-Modul; hardness; Kohlenstoff-Schichten; Oberflächenwelle; Schichthärte; surface wave; titanium nitride; Titannitrid; Ultraschall; ultrasonic wave; Young's modulus

The feasible characterization of layer materials is decisive for optimizing the surface properties and for quality assurance. The module of elasticity and/or density of thin and very thin layers down to 100 nanometres can be determined quickly and reliably by means of high-frequency ultrasonic surface wave,, excited by short laser pulses