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Duennschicht-Gassensor

Thin film gas sensor
 
: Steiner, K.; Kuehner, G.; Hoefer, U.

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Frontpage ()

DE 1993-4334410 A: 19931008
DE 1993-4334410 A: 19931008
DE 4334410 C2: 19950720
G01N0027
German
Patent, Electronic Publication
Fraunhofer IPM ()

Abstract
The invention relates to a thin-film gas sensor on a flat, inert, heatable substrate (2) provided with a passivation layer (7) and a deposited gas-sensitive SnO<-2 layer (6) connected to contact electrodes (3,4), whereby the gas-sensitive SnO<-2 layer (6) can be doped with catalyst material or at least can be partially provided with a layer (5) containing a catalyst material, whereby the sensitive layer (6) is CO<-2-sensitive, whereby the sensitive layer (6) and/or the surface, if necessary, the catalyst layer (5), contains Ca and/or Ca-oxide promotors.

: http://publica.fraunhofer.de/documents/PX-10275.html