• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. DLC and metallic nanometer multilayers deposited by laser-arc
 
  • Details
  • Full
Options
1997
Journal Article
Title

DLC and metallic nanometer multilayers deposited by laser-arc

Other Title
DLC und metallische Nanometer-Mehrlagenschichten abgeschieden mit dem Laser-Arc
Abstract
The method of laser-induced vacuum arc (laser-arc) combines the good controllability of pulsed laser deposition with the high efficiency of a vacuum arc technique. One advantage of this technique is the essential reduction of droplets allowing the deposition of high-quality amorphous carbon films. These hydrogen-free films with very high hardness up to the superhard range exhibit excellent wear resistance and low friction. In the present paper, another advantage of the laser-arc is demonstrated, i.e. the possibility of depositing multilayer coatings down to the nanometer level of each individual layer thickness with high efficiency and high accuracy. These possibilities open new ways to overcome the principal problem of hard PVD coatings, i.e. the high internal stress which restricts the film thickness. Multilayer systems of Al-C and Ti-C with systematic variations of single layer thickness and thickness relationship were analysed by electron microscopy and Auger electron spectroscopy. The Young's moduli were measured by the non-destructive ultrasonic surface wave method (US-SAW). The alternating hard and ductile layers allowed a remarkable relaxation of the internal stresses. Furthermore, the growth of the particle induced defects (droplets) could be strongly reduced.
Author(s)
Ziegele, H.
Scheibe, H.J.
Schultrich, B.
Journal
Surface and coatings technology  
DOI
10.1016/S0257-8972(97)00218-1
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • Laser-Arc

  • Kohlenstoff-Schichten

  • Keramik

  • Multischicht

  • Nanomaterialien

  • Grenzfläche

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024