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In-situ particle measurement in loading stations of furnaces

 
: Trunk, R.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Storbeck, O.

Technologie Zentrum Dresden; Fraunhofer-Management-Gesellschaft -FhM-, München:
2nd European Advanced Equipment Control / Advanced Process Control (AEC/APC) Conference 2001. Proceedings. CD-ROM
Dresden, 2001
European Advanced Equipment Control / Advanced Process Control Conference (AEC/APC Europe) <2, 2001, Dresden>
English
Conference Paper
Fraunhofer IIS B ( IISB) ()
ISPM; wafer handling; minienvironment; AEC/APC

: http://publica.fraunhofer.de/documents/N-9891.html