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Cost reduction strategies for wafer expenditure
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2001
Journal Article
Titel
Cost reduction strategies for wafer expenditure
Author(s)
Pfitzner, L.
Benesch, N.
Öchsner, R.
Schmidt, C.
Schneider, C.
Tschaftary, T.
Trunk, R.
Dudenhausen, H.-M.
Zeitschrift
Microelectronic engineering
DOI
10.1016/S0167-9317(00)00504-9
Language
English
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IIS-B
Tags
300mm wafer
integrated metrology
AEC/APC
wafer reclaim