2009
Conference Paper
Title

Photonic crystals in lithium niobate by ion-beam enhanced etching

Abstract
A photonic crystal defect waveguide fabricated in a freestanding LiNbO3 membrane is presented. The three dimensional patterning was done by means of ion-beam enhanced etching.
Author(s)
Hartung, H.
Geiss, R.
Gischkat, T.
Schrempel, F.
Iliew, R.
Pertsch, T.
Lederer, F.
Wesch, W.
Kley, E.-B.
Tünnermann, A.
Mainwork
Conference
DOI
Language
English