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Micromirror arrays for wavefront correction

 
: Gehner, A.; Wildenhain, M.

Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme -IMS-, Dresden; Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme -IMS-, Duisburg; Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme -IMS-, München:
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme. Annual Report 2000
Duisburg: IMS, 2001
ISSN: 1435-0874
pp.53-56 : Ill., Lit.
English
Book Article
Fraunhofer IMS ()

Abstract
For different piston-type micromirror arrays on top of passive address devices we demonstrated their analog operation capability up to a maximum deflection of 1.2 µm corresponding to phase shifts of 3...6 x 2 pi in the visible, which seems sufficient for many applications in adaptive optics. Thereby, the required address voltages are below 35 V, which is feasible for active matrix addressing. In order to meet the postulated phase shift accuracy of lambda/10 the observed height variations have to be further reduced an optimization of process technology. In addition, we intend to reduce the mirror size down to 40 µm to provide a finer segmentation for wavefront correction and also to minimize mirror bending. Furthermore, we will implement those mirrors on top of an active address matrix, which is under development now.

: http://publica.fraunhofer.de/documents/N-9683.html