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MAGIC: A european program to push the insertion of maskless lithography
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2008
Conference Paper
Titel
MAGIC: A european program to push the insertion of maskless lithography
Author(s)
Pain, L.
Icard, B.
Tedesco, S.
Kampherbeck, B.
Gross, G.
Klein, C.
Loeschner, H.
Platzgummer, E.
Morgan, R.
Manakli, S.
Kretz, J.
Holhe, C.
Choi, K.-H.
Thrum, F.
Kassel, E.
Pilz, W.
Keil, K.
Butschke, J.
Irmscher, M.
Letzkus, F.
Hudek, P.
Paraskevopoulos, A.
Ramm, P.
Weber, J.
Hauptwerk
Emerging lithographic technologies XII
Konferenz
Conference "Emerging Lithographic Technologies" 2008
DOI
10.1117/12.772472
Language
English
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Fraunhofer-Institut für Nachrichtentechnik, Heinrich-Hertz-Institut HHI