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Sub-micron referencing system for ultra precision machining processes

 
: Brecher, C.; Weinzierl, M.; Schmitt, R.; Köllmann, D.; Rashid, A.

Dimov, S.; Menz, W. ; European Commission:
4M 2008, Fourth International Conference on Multi-Material Micro Manufacture : 9th - 11th September 2008, Cardiff, UK
Dunbeath: Whittles, 2008
ISBN: 978-1-904445-76-0
ISBN: 1-904445-76-4
pp.313-316
International Conference on Multi-Material Micro Manufacture (4M) <4, 2008, Cardiff>
English
Conference Paper
Fraunhofer IPT ()

: http://publica.fraunhofer.de/documents/N-96020.html