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Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering
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2008
Conference Paper
Titel
Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering
Author(s)
Quenzer, H.-J.
Dudde, R.
Jacobsen, H.
Wagner, B.
Föll, H.
Hauptwerk
Nanotechnology 2008, NSTI Nanotechnology Conference and Trade Show. Technical Proceedings. Vol.3
Konferenz
Nanotechnology Conference and Trade Show (Nanotech) 2008
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT