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Electrical AFM techniques for the advanced characterization of materials in semiconductor technology

Poster at NanoScale VI, Berlin, Germany, July 9-11, 2008
 
: Yanev, V.; Rommel, M.; Spoldi, G.; Beuer, S.; Amon, B.; Petersen, S.; Lugstein, A.; Steiger, A.; Bauer, A.J.; Ryssel, H.

:
Fulltext urn:nbn:de:0011-n-956951 (811 KByte PDF)
MD5 Fingerprint: eabe256be767ffb6c9956958f09f5e78
Created on: 16.6.2009


2008, 1 Folie
Conference "NanoScale" <6, 2008, Berlin>
English
Poster, Electronic Publication
Fraunhofer IISB ()
SPM; AFM; electrical characterization; SSRM; SCM; TUNA

: http://publica.fraunhofer.de/documents/N-95695.html