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Experimental observation of FIB induced lateral damage on silicon samples

Poster at 34th International Conference on Micro&Nano Engineering, MNE 2008, Athens
 
: Spoldi, G.; Beuer, S.; Rommel, M.; Yanev, V.; Bauer, A.J.; Ryssel, H.

:
Fulltext urn:nbn:de:0011-n-956924 (1.5 MByte PDF)
MD5 Fingerprint: 253bf7e7a13d9ca5fddbf9a1b95c9176
Created on: 16.6.2009


2008, 1 Folie
International Conference on Micro- and Nano-Engineering (MNE) <34, 2008, Athens>
English
Poster, Electronic Publication
Fraunhofer IISB ()
focused ion beam; ion implantation damage; scanning capacitance microscopy; scanning spreading resistance microscopy

: http://publica.fraunhofer.de/documents/N-95692.html