Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

New materials in future memories: High temperature behaviour of Sr, Bi and Ir on silicon surfaces monitored by TXRF and ELYMAT

: Kilian, G.; Kolbesen, B.O.; Rommel, M.; Pamler, W.; Unger, E.; Höpfner, A.

Kolbesen, B.O. ; Electrochemical Society -ECS-, Electronics Division:
Crystalline defects and contamination. Their impact and control in device manufacturing III : Proceedings of the satellite symposium to ESSDERC 2001, Nuremberg, Germany / DECON 2001
Pennington, NJ: ECS, 2001 (Electrochemical Society. Proceedings 2001-29)
ISBN: 1-566-77363-6
ISSN: 0091-391X
Satellite Symposium on Crystalline Defects and Contamination - Their Impact and Control in Device Manufacturing (DECON) <3, 2001, Erlangen>
European Solid-State Device Research Conference (ESSDERC) <31, 2001, Nürnberg>
Conference Paper
Fraunhofer IISB ()
TXRF; Elymat; contamination; silicon