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Modular bimorph mirrors for adaptive optics

: Rodrigues, G.; Bastaits, R.; Roose, S.; Stockman, Y.; Gebhardt, S.; Schönecker, A.; Villon, P.; Preumont, A.

Optical engineering 48 (2009), No.3, Art. 034001, 7 pp.
ISSN: 0091-3286
ISSN: 0036-1860
ISSN: 1560-2303
Journal Article
Fraunhofer IKTS ()
aberration; adaptive optics; lead compound; mirror; optical fabrication; piezoelectric actuator; silicon; thick film devices

This paper examines the possibility of constructing deformable mirrors for adaptive optics with a large number of degrees of freedom from silicon wafers with bimorph piezoelectric actuation. The mirror may be used on its own, or as a segment of a larger mirror. The typical size of one segment is 100 to 200 mm; the production process relies on silicon wafers and thick film piezoelectric material deposition technology; it is able to lead to an actuation pitch of the order of 5 mm, and the manufacturing costs appear to grow only slowly with the number of degrees of freedom in the adaptive optics.