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Monitoring system for airborne molecular contamination (AMC) in semiconductor manufacturing areas and micro-environments
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2009
Conference Paper
Titel
Monitoring system for airborne molecular contamination (AMC) in semiconductor manufacturing areas and micro-environments
Author(s)
Otto, M.
Leibold, A.
Wulf, L.
Hurlebaus, M.
Pfitzner, L.
Hauptwerk
Ultra clean processing of semiconductor surfaces IX, UCPSS 2008
Konferenz
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) 2008
DOI
10.4028/www.scientific.net/SSP.145-146.135
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB