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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Monitoring system for airborne molecular contamination (AMC) in semiconductor manufacturing areas and micro-environments

 
: Otto, M.; Leibold, A.; Wulf, L.; Hurlebaus, M.; Pfitzner, L.

:

Mertens, P.:
Ultra clean processing of semiconductor surfaces IX, UCPSS 2008 : 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), held in Bruges, Belgium, September 22 - 24, 2008
Stafa-Zurich: Trans Tech Publications, 2009 (Solid state phenomena 145/146)
ISBN: 3-908451-64-7
ISBN: 978-3-908451-64-8
ISSN: 1012-0394
pp.135-138
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) <9, 2008, Bruges>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-94761.html