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Complementary metrology within a European joint laboratory

 
: Nutsch, A.; Beckhoff, B.; Altmann, R.; Berg, J.A. van den; Giubertoni, D.; Hoenicke, P.; Bersani, M.; Leibold, A.; Meirer, F.; Müller, M.; Pepponi, G.; Otto, M.; Petrik, P.; Reading, M.; Pfitzner, L.; Ryssel, H.

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Mertens, P.:
Ultra clean processing of semiconductor surfaces IX, UCPSS 2008 : 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), held in Bruges, Belgium, September 22 - 24, 2008
Stafa-Zurich: Trans Tech Publications, 2009 (Solid state phenomena 145/146)
ISBN: 3-908451-64-7
ISBN: 978-3-908451-64-8
ISSN: 1012-0394
pp.97-100
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) <9, 2008, Bruges>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-94760.html