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Complementary metrology within a European joint laboratory
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2009
Conference Paper
Titel
Complementary metrology within a European joint laboratory
Author(s)
Nutsch, A.
Beckhoff, B.
Altmann, R.
Berg, J.A. van den
Giubertoni, D.
Hoenicke, P.
Bersani, M.
Leibold, A.
Meirer, F.
Müller, M.
Pepponi, G.
Otto, M.
Petrik, P.
Reading, M.
Pfitzner, L.
Ryssel, H.
Hauptwerk
Ultra clean processing of semiconductor surfaces IX, UCPSS 2008
Konferenz
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) 2008
DOI
10.4028/www.scientific.net/SSP.145-146.97
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB