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X-ray residual stress gradient analysis in annealed silver thin films using asymmetric bragg diffraction

: Njeh, A.; Schneider, D.; Fuess, H.; Ben Ghozlen, M.H.

Zeitschrift für Naturforschung. A 64 (2009), No.1-2, pp.112-122
ISSN: 0044-3166
ISSN: 0932-0784
Journal Article
Fraunhofer IWS ()

Residual stresses were determined in magnetron-sputtered Ag thin films of 400 nm thickness by asymmetric Bragg scattering. The corresponding cos(2 alpha)sin(2) psi plots were nonlinear which indicates a strong residual gradient along the depth of the samples. The in-plane stress was highly compressive at the sample surface and became tensile at the interface. The out-plane stress was compressive and reached its maximum at the sample interface. The stress gradient changed significantly with post-annealing temperature. A Young's modulus of E = 83 GPa and a Poisson ratio of v = 0.3 were measured by surface acoustic wave dispersion.