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Inner coating of EUV collector shells

 
: Lipfert, S.; Braun, S.; Gawlitza, P.; Schmidt, J.; Leson, A.

European Joint Committee on Plasma and Ion Surface Engineering; Europäische Forschungsgesellschaft Dünne Schichten e.V. -EFDS-:
PSE 2008, 11th International Conference on Plasma Surface Engineering 2008. Proceedings : Garmisch-Partenkirchen, Germany, September 15 - 19, 2008
Dresden: EFDS, 2008
pp.332
International Conference on Plasma Surface Engineering (PSE) <11, 2008, Garmisch-Partenkirchen>
English
Conference Paper
Fraunhofer IWS ()

: http://publica.fraunhofer.de/documents/N-94274.html