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Micromachined mid-infrared emitter for fast transient temperature operation for optical gas sensing systems

 
: Hildenbrand, J.; Kürzinger, A.; Peter, C.; Moretton, E.; Wöllenstein, J.; Naumann, F.; Ebert, M.; Korvink, J.

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Postprint urn:nbn:de:0011-n-941843 (1.6 MByte PDF)
MD5 Fingerprint: 2e6b199c7a8b9538eb2612ef81be2366
© 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Created on: 27.7.2010


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE Sensors 2008, the Seventh IEEE Conference on Sensors : October 26-29, 2008, Lecce (Italy)
New York, NY: IEEE, 2008
ISBN: 1-4244-2581-5
ISBN: 978-1-4244-2580-8
pp.297-300
Conference on Sensors <7, 2008, Lecce/Italien>
English
Conference Paper, Electronic Publication
Fraunhofer IPM ()
Fraunhofer IWM-H ()
electric heating; etching; gas sensor; optical sensor; silicon-on-insulator

Abstract
A novel micromachined thermal emitter for fast transient temperature operation is presented. Most commercial available thermal emitters are not able to operate in a pulsed mode. The spider type hotplate concept promises an excellent mechanical stability together with high thermal decoupling. The thermal emitter is fabricated using silicon on insulator (SOI) technology and KOH-etching. The emitter is heated with a Pt-meander structure and the device is mounted in a TO-5 housing. Different suspensions structures as well as hotplate sizes were realized and mechanical and thermal characterizations were performed. Beside the possibility of pulsed operation, a high thermal emission at wavelengths >5 mum are achieved. Investigations on possible coatings for emissivity enhancement are the focus of the current work.

: http://publica.fraunhofer.de/documents/N-94184.html